| 講演要旨： |
Micro-fabricated electric generators, scavenging ambient mechanical energy, are potential power sources for autonomous systems. Described presently are the modeling, design and implementation of a single-wafer floating-electrode electric micro-generator, integrating a micro-mechanical resonator and a number of electronic devices. Forming a plate of a variable capacitor, the resonator is responsible for converting mechanical vibration to electricity. A sense transistor and a diode bridge are integrated respectively for monitoring the "charging" of the floating electrode and for rectification. A lumped electro-mechanical model of the generator is developed and expressed in terms of a set of non-linear coupled state equations that are numerically solved. For small-amplitude excitation, a circuit based on a set of literalized equations is developed. The generator is realized using a compatible combination of standard CMOS "floating-gate" process and a post-CMOS photo-resist molded electroplating process. Reasonable agreement between model predictions and measurement results was obtained. |
