| 日時： |
2006年07月20日（木） 13:00〜14:30 |
| 場所： |
京都大学 工学部物理系校舎 2階 211会議室 |
| 講演者： |
Prof. Man Wong (Department of Electrical and Computer Engineering, Hong Kong University of Science and Technology) |
| 講演題目： |
Piezoresistive microphone with integreted amplifier realized using metal-induced laterally crystallized polycrystalline silicon |
| 講演要旨： |
Metal-induced lateral crystallization (MILC) of amorphous silicon is an alternative low-temperature technique of forming good quality polycrystalline silicon (poly-Si). The addition of a high temperature re-crystallization (RC) step further improves the crystal quality. Compared to conventional low pressure deposited poly-Si, RC-MILC poly-Si possesses improved mechanical and electrical properties. RC-MILC poly-Si piezoresistors exhibit ~25% increase in gauge factor and ~50% reduction in noise level compared to conventional poly-Si piezoresistors. RC-MILC poly-Si transistors exhibit performance approaching those built on single-crystal silicon. As a demonstration of the feasibility of using the RC-MILC poly-Si technology to realize non-trivial micro-systems, microphone integrating piezoresistive strain sensors and amplifiers has been designed, fabricated and characterized. |
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