Paddy French 教授 特別講演会

The integration of Microsystems with electronics opens many opportunities for increased functionality. For example, a single-chip device can be fabricated with on-chip self-test, self-calibration, cross-sensitivity compensation and with a standard digital output. This increases reliability and reduces leading to many new applications, including safety critical ones. However, this integration can also lead to problems. Some harsh environments are simply not suitable for electronics and therefore the two parts have to be separated. A greater problem can be the processing. Processing for electronics and MEMS have to be compatible and should be kept as simple as possible to keep down costs and maximise yield. It is for this reason that many companies have opted for a two-chip approach where the process for the MEMS device can be optimised without concern over the electronics. Despite the complications many successful examples of integrated MEMS can be found. Perhaps the most famous is the Analog Devices accelerometer, which combines surface micromachining with CMOS read-out electronics.

Microsystems development in Delft dates back to the 1970's when Professor Middelhoek had the vision of smart sensors fabricated in silicon. The group has grown to about 50 people covering all aspects of silicon sensor development from technology to systems. The group is part of the DIMES research school which has a complete cleanroom where both CMOS and bipolar processes are available. In addition a wide range of special processing can be added to the electronics processing as both integrated and post-processing.

This talk will give a brief overview of Delft and the development of integrated Microsystems. This will be followed by a more detailed look at technologies and devices developed in Delft.